This equipment is suitable for chip sorting process after wafer dicing. Chips are picked up from wafer by visual identification, positioning, then placed into a dedicated carrier, such as waffle pack tray,tape frame or other carriers.
Suitable for thin and slim chips, such as storage chips (thin chips), driver ICs, MEMS, etc.
Supports 8-12 inch wafer rings or cassettes
Compatible with 2/3/4 inch trays, and can expand the die binning function
Standard Function : chips are picked up from wafer and placed to tray (Wafer to Tray)
Application Function : chips are picked from wafer and placed to frame (Wafer to Frame)
Application Function : chips are picked from tray and placed to frame (Tray to Frame)
project | Specification Description |
---|---|
UPH | <=8K(depending on chip size and pick-and-place process parameters) |
Chip Thickness | 0.2~0.7mm |
Chip Size | 0.5x0.5 mm ~ 25x25 mm |
Placement Accuracy | XY: ± 50μm(3σ),θ± 1゜ |
Pick up Force | 60~250g |
Wafer Size | 12 inch standard(8inch / 6inch optional) |
Wafer Loading/Unloading | Fully automatic ( 12 inch wafer cassette ) |
Wafer Mapping | Supports standard wafer map format |
Wafer Bin Number | 1 bin(standard)、3 bin(option) |
Tray Loading/Unloading | Fully automatic (tray stacked loader and unloader, 30 pcs.) |
Tray Size | 2”、3”、4”waffle Pack Tray |
Weight | 1200kg |